Real Madrid won 2-0 on the night, but could not prevent Borussia Dortmund reaching the Champions League Final 4-3 on aggregate.
Jose Mourinho’s men had a mountain to climb after losing the first leg 4-1 in Germany, but came tearing out the blocks.
There were several chances for the Spaniards in the opening 15 minutes, then Robert Lewandowski rattled the bar and an incredible Diego Lopez save denied Ilkay Gundogan.
Real finally broke through at the 83rd minute when Benzema tapped in an Ozil assist, but they were still 4-2 down on aggregate.
Benzema created the second, pulling back from the by-line for Sergio Ramos to smash under the bar from six yards, so Real Madrid needed just one more goal, but couldn’t find that extra push.
The other semi-final Barcelona-Bayern Munich is tomorrow night, as the Blaugrana try to come back from a 4-0 first leg defeat.
The Champions League Final is on May 25 at Wembley Stadium.